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In this work, the vapor-phase infiltration (VPI) of polyethylene terephthalate (PET) fabrics with trimethylaluminum (TMA) and coreaction with water vapor is explored as a function of limiting TMA reagent conditions versus excess TMA reagent conditions at two infiltration temperatures. TMA is found to sorb rapidly into PET fibers, with a significant pressure drop occurring within seconds of TMA exposure. When large quantities of polymer are placed within the chamber, minimal residual precursor remains at the end of the pressure drop. This rapid and complete sorption facilitates the control of inorganic loading by purposely delivering a limited quantity of the TMA reagent. The inorganic loading for this system scales linearly with a Precursor:C=O molar ratio of up to 0.35 at 140 °C and 0.5 at 80 °C. After this point, inorganic loading is constant irrespective of the amount of additional TMA reagent supplied. The SEM analysis of pyrolyzed hybrids indicates that this is likely due to the formation of an impermeable layer to subsequent infiltration as the core of the fibers remains uninfiltrated. The Precursor:C=O molar ratio in the subsaturation regime is found to tune the hybrid fabric morphology and material properties such as the optical properties of the fabric. Overall, this work demonstrates how a reagent-limited processing route can control the inorganic loading in VPI synthesized hybrid materials in a simpler manner than trying to control kinetics-driven methods.